Modeling Solid Phase Epitaxial Growth for Patterned Ge Substrates
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference32 articles.
1. Anomalous activation of shallow B+ implants in Ge
2. Diffusion, activation, and recrystallization of boron implanted in preamorphized and crystalline germanium
3. Preamorphization implantation-assisted boron activation in bulk germanium and germanium-on-insulator
4. Self-implantation energy and dose effects on Ge solid-phase epitaxial growth
5. Intrinsic and dopant-enhanced solid-phase epitaxy in amorphous germanium
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