Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
24 articles.
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1. Physical Sputtering and Sputter Deposition;The Foundations of Vacuum Coating Technology;2018
2. References;The Foundations of Vacuum Coating Technology;2003
3. Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications;Materials Science and Engineering: R: Reports;1998-05
4. Characteristics of ta2O5 thin film prepared by electron beam heating method;Electronics and Communications in Japan (Part II: Electronics);1994-06
5. Physical Vapor Deposition Under Plasma Conditions;Film Deposition by Plasma Techniques;1992