Characteristics of ta2O5 thin film prepared by electron beam heating method
Author:
Publisher
Wiley
Subject
Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy
Reference21 articles.
1. DC electroluminescence in InSnxOy-Ta2O5-ZnS:Mn-Ta2O5-Al thin film structures
2. Thin-Film Electroluminescent Device Employing Ta2O5RF Sputtered Insulating Film
3. Thermal oxidation of β-Ta below 500 °C
4. Oxidation of tantalum film on silicon
5. Chemical Vapor Deposition of Tantalum Pentoxide Films for Metal‐Insulator‐Semiconductor Devices
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3. Investigation on nano-absorbing precursors in the picosecond regime via the comparative study of HfO2/SiO2 and Ta2O5/SiO2 high-reflectivity coating damage;Optical Materials Express;2023-06-01
4. Annealing effects on the optical and electrochemical properties of tantalum pentoxide films;Journal of Advanced Ceramics;2021-03-21
5. Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition;Optics and Spectroscopy;2020-02
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