Physical Sputtering and Sputter Deposition-Reference-Cited by-同舟云学术

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Physical Sputtering and Sputter Deposition

Published:2018 Issue: Volume: Page:87-149
ISSN:
Container-title:The Foundations of Vacuum Coating Technology
language:
Short-container-title:

Author:

Mattox Donald M.

Publisher

Elsevier

Reference475 articles.

1. A Short History: Physical Sputtering;Mattox,2017

2. Vapor-Plating: The Formation of Coatings by Vapor-Deposition Techniques;Powell,1955

3. History and milestones in Ch. 3, The nature of physical sputtering;Wehner,1970

4. Rays of Positive Electricity and their Application to Chemical Analysis;Thompson,1913

5. Sputtering: the material erosion tool;Ramana Murty;Surf. Sci.,2002

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermoelectric Materials and Applications: A Review;Energies;2023-09-04

2. Sputtering Deposition;Thin Films - Deposition Methods and Applications;2023-03-29

3. Advances in surface modification and functionalization for tailoring the characteristics of thin films and membranes via chemical vapor deposition techniques;Journal of Applied Polymer Science;2023-02-23

4. Atomic Force Microscopy-Based Static Plowing Lithography Using CaCO3 Nanoparticle Resist Layers as a Substrate-Flexible Selective Metal Deposition Resist;The Journal of Physical Chemistry C;2021-10-18

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