Author:
Tamilmani Subramanian,Huang Wayne,Raghavan Srini
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Electrochemical Planarization for Multilevel Metallization
2. Initial study on copper CMP slurry chemistries
3. D. R. Evans , inChemical Mechanical Planarization I, S. Raghavan and I. Ali , Editors, PV 96-22, p. 70, The Electrochemicial Society Proceedings Series, Pennington, NJ (1996).
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