Toward Successful Integration of Porous Low-k Materials: Strategies Addressing Plasma Damage
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference122 articles.
1. Porous Dielectrics in Microelectronic Wiring Applications
2. Low Dielectric Constant Materials
3. Dubois G. Volksen W. , in Adv. Interconnects ULSI Technol., Baklanov M. R. Ho P. S. Zschech E. Editors, p. 3, Wiley (2012).
4. Hoofman R. J. O. M. Nguyen V. H. Arnal V. Broekaart M. Gosset L. G. Besling W. F. A. Fayolle M. Iacopi F. , in Dielectric Films for Advanced Microelectronics, Baklanov M. Maex K. Green M. Editors, p. 199, Wiley (2007).
5. Hybrid low dielectric constant thin films for microelectronics
Cited by 50 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Chemical structure characteristics of flexible low-k SiCOH thin films etched by inductively coupled plasma-reactive ion etching process using FTIR and XPS spectra analysis;Microelectronic Engineering;2024-09
2. Remote plasma chemical vapor deposition of silicon oxycarbide film with a styrene-containing precursor and in situ O2 plasma treatment;Thin Solid Films;2024-06
3. Computational Analysis of the Effects of Nanoscale Confinement on the Structure of Low-k Dielectric Hybrid Organosilicate Materials;IEEE Transactions on Materials for Electron Devices;2024
4. Comparison of Cobalt Integration with Various Dielectric Materials under Thermal and Electrical Stress;Coatings;2023-10-23
5. Peculiarities of Interaction of Low-Energy Noble Gas Atoms with Methyl Groups on the Low-κ Surface;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3