Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. The International Technology Roadmap for Semiconductors, Front End Processes, Table 70 (2003).
2. H. Kawahara , inUltraclean Surface Processing of Silicon Wafer, p. 451, T. Hattori , Editor, Springer-Verlag, Berlin (1998).
3. J. Q. Liu, C. Lee, J. M. Rosamilia, T. Boone, and G. S. Higashi , inProceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Manufacturing, Vol. 97–35, p. 552, Paris, The Electrochemical Society, Pennington, NJ (1997).
4. Characterization of Crystal Quality by Crystal Originated Particle Delineation and the Impact on the Silicon Wafer Surface
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献