Pad Scratching in Chemical-Mechanical Polishing: The Effects of Mechanical and Tribological Properties
Author:
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference45 articles.
1. Chemical‐Mechanical Polishing for Fabricating Patterned W Metal Features as Chip Interconnects
2. Chemical-mechanical polishing: enhancing the manufacturability of MEMS
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