Multiple Roles of Hydrogen Treatments in Amorphous In–Ga–Zn–O Films-Reference-Cited by-同舟云学术

Multiple Roles of Hydrogen Treatments in Amorphous In–Ga–Zn–O Films

Published:2017 Issue:7 Volume:6 Page:P365-P372
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Tang Haochun^ORCID,Kishida Yosuke,Ide Keisuke,Toda Yoshitake,Hiramatsu Hidenori,Matsuishi Satoru,Ueda Shigenori,Ohashi Naoki,Kumomi Hideya,Hosono Hideo,Kamiya Toshio

Funder

Japan Society for the Promotion of Science (JSPS)

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference41 articles.

1. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors

2. Present status of amorphous In–Ga–Zn–O thin-film transistors

3. Effects of Diffusion of Hydrogen and Oxygen on Electrical Properties of Amorphous Oxide Semiconductor, In-Ga-Zn-O

4. Roles of Hydrogen in Amorphous Oxide Semiconductor In-Ga-Zn-O: Comparison of Conventional and Ultra-High-Vacuum Sputtering

5. Effects of High-Temperature Annealing on Operation Characteristics of a-In-Ga-Zn-O TFTs

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