Study of Wet Surface Activation Routes to Enable the Deposition of Monomolecular Organic Thin Films on k 2.0 Porous Dielectrics-Reference-Cited by-同舟云学术

Study of Wet Surface Activation Routes to Enable the Deposition of Monomolecular Organic Thin Films on k 2.0 Porous Dielectrics

Published:2014 Issue:1 Volume:3 Page:N3106-N3111
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Armini S.,Loyo Prado J.,Krishtab M.,Conard T.,Meersschaut J.,Le Q. T.,Verdonck P.,Baklanov M. R.

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference33 articles.

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3. Ta penetration into template-type porous low-k material during atomic layer deposition of TaN

4. Study of Chemical Vapor Deposition of Manganese on Porous SiCOH Low-k Dielectrics Using Bis(ethylcyclopentadienyl)manganese

5. Mechanism of porous low-k film damage induced by plasma etching radicals

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