Author:
Zheng J. P.,Klug B. K.,Roy D.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference55 articles.
1. The International Technology Roadmap for Semiconductors, http://www.itrs.net/Links/2006Update/2006UpdateFinal.htm
2. Integration challenges of porous ultra low-k spin-on dielectrics
3. Enhancing the resistance of low-k hydrogen silsesquioxane (HSQ) to wet stripper damage
4. Effect of pH on CMP of Copper and Tantalum
5. Chemical Mechanical Planarization of Semiconductor Materials, M. R. Oliver , Editor, Springer, New York (2006).
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