Author:
Yoon Soon-Gil,Kingon A. I.
Abstract
The effect of hydrogen on ferroelectric properties was investigated for
(
Pb
,
La
)
(
Zr
,
Ti
)
O
3
(
PLZT
)
films with Pt and
IrO
2
top electrodes. The P-E hysteresis loop and fatigue properties of the Pt/PLZT/Pt capacitor are completely recovered by recovery anneal at 700°C in
O
2
ambient after a hydrogen-forming gas anneal. On the other hand,
IrO
2
/
PLZT
/
Pt
capacitor after recovery anneal does not show a complete recovery for ferroelectric properties. The
IrO
2
top electrode in the
IrO
2
/
PLZT
/
Pt
capacitor is completely reduced to Ir metal in 4%
H
2
at 300°C and then change to the
IrO
2
/
Ir
complex phase after recovery anneal at 700°C in
O
2
ambient. The ferroelectric properties of PLZT capacitors greatly depend on the residual hydrogen near the film/top electrode interface after recovery anneal. © 2001 The Electrochemical Society. All rights reserved.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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