Author:
Polignano M. L.,Codegoni D.,Galbiati A.,Grasso S.,Mica I.,Moccia G.,Nardone G.,Russo F.
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference45 articles.
1. Graf K. , Metal impurities in silicon device fabrication, Springer-Verlag, Berlin, (1995).
2. Diagnostic and monitoring tools of large scale Si-manufacturing: trace-analytical tools and techniques in Si-wafer manufacturing
3. Danel A. Straube U. Kamarinos G. Kamieniecki E. Tardif F. , in Cleaning Technology in Semiconductor Device Manufacturing, PV 97–35, p. 400, The Electrochemical Society Proceeding Series, Pennington, NJ (1998).
4. Iron and its complexes in silicon
5. Iron contamination in silicon technology
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献