Iron contamination in silicon technology-Reference-Cited by-同舟云学术

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Iron contamination in silicon technology

Published:2000-05-01 Issue:5 Volume:70 Page:489-534
ISSN:0947-8396
Container-title:Applied Physics A: Materials Science & Processing
language:
Short-container-title:Applied Physics A: Materials Science & Processing

Author:

Istratov A.A.,Hieslmair H.,Weber E.R.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s003390051074.pdf

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