Author:
Choi Kyu-Jeong,Park Jong-Bong,Yoon Soon-Gil
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Scaling the gate dielectric: Materials, integration, and reliability
2. B. H. Lee, R. Choi, L. Kang, S. Gopalan, R. Nieh, K. Onishi, Y. Jeon, W. Qi, C. Kang, and J. C. Lee, Tech. Dig. - Int. Electron Devices Meet., 39 (2000).
3. Electrical properties of hafnium silicate gate dielectrics deposited directly on silicon
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