Author:
Shin Joong-Won,Tanuma Masakazu,Ohmi Shun-ichiro
Abstract
Abstract
In this research, the effects of sputtering power on the ferroelectric property of 5 nm thick ferroelectric nondoped HfO2 were investigated for metal–ferroelectric–semiconductor field-effect-transistor application. The remnant polarization (2P
r) was increased to 5.9 μC cm−2, and the density of interface states (D
it) at silicon interface was effectively reduced to 1.8 × 1011 cm−2 eV−1 when the sputtering power was 50 W for 5 nm thick nondoped HfO2 formation. The largest Weibull slope (β) of 1.76 was extracted in Weibull distribution plot of the time-dependent dielectric breakdown measurements, and excellent fatigue properties until 1010 cycles were realized. The memory window of 0.56 V was realized by the pulse amplitude and width of −1/6 V and 100 ms, respectively. Furthermore, the memory characteristic was expected to be maintained ever after 10 years of retention time.
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
1 articles.
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