Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. T. Hattori, inContamination Control and Defect Reduction in Semiconductor Manufacturing III, D. N. Schmidt, D. Reedy, R. L. Guldi, and J. V. Martinez de Pinillos, Editors, PV 94-9, p. 3, The Electrochemical Society Proceedings Series, Pennington, NJ (1994).
2. Control factor of native oxide growth on silicon in air or in ultrapure water
3. Oxidation of HF‐treated Si wafer surfaces in air
4. Unusually Low Surface-Recombination Velocity on Silicon and Germanium Surfaces
Cited by
26 articles.
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