Control factor of native oxide growth on silicon in air or in ultrapure water
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102435
Reference5 articles.
1. Optical Measurement of Film Growth on Silicon and Germanium Surfaces in Room Air
2. Oxidation of Si and GaAs in air at room temperature
3. Oxide Growth on Etched Silicon in Air at Room Temperature
4. Growth of Native Oxide on Silicon
5. Theory of the oxidation of metals
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