Laser ablation for membrane processing of AlGaN/GaN- and micro structured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions-Reference-Cited by-同舟云学术

Laser ablation for membrane processing of AlGaN/GaN- and micro structured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions

Published:2015-05-21 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Zehetner J.,Vanko G.,Dzuba J.,Ryger I.,Lalinsky T.,Benkler Manuel,Lucki Michal

Publisher

SPIE

Reference8 articles.

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3. Effect of external strain on the conductivity of AlGaN/GaN high-electron-mobility transistors

4. Pressure-induced changes in the conductivity of AlGaN∕GaN high-electron mobility-transistor membranes

5. Bulk micromachining of SiC substrate for MEMS sensor applications

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