Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor-Reference-Cited by-同舟云学术

Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor

Published:2020-07 Issue: Volume:309 Page:112017
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhao You,Zhao Yu-Long,Wang Lu-Kang

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Key Research and Development Project of Shaanxi Province

Technology Innovation Guidance of Shaanxi Province

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference48 articles.

1. Improved reliability of SiC pressure sensors for Long term High temperature applications;Okojie,2011

2. Design of laser micromachined single crystal 6H–SiC diaphragms for high-temperature micro-electro-mechanical-system pressure sensors;Gupta;Mater. Des.,2011

3. Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching;Khuat;Appl. Surf. Sci.,2014

4. High temperature smart-cut SOI pressure sensor;Guo;Sens. Actuators A Phys.,2009

5. SOI-based, high reliable pressure sensor with floating concept for high temperature applications;Giuliani;Procedia Eng.,2014

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