SOI-based, High Reliable Pressure Sensor with Floating Concept for High Temperature Applications-Reference-Cited by-同舟云学术

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SOI-based, High Reliable Pressure Sensor with Floating Concept for High Temperature Applications

Published:2014 Issue: Volume:87 Page:720-723
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Giuliani Andrea,Drera Lionello,Arancio Domenico,Mukhopadhyay Biswaijit,Ngo Ha-Duong

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference3 articles.

1. Liquid-free, piezoresistive, SOI-based pressure sensor for high temperature measurements up to 400 ̊C, Sensors;Ngo Ha-Duong,2012

2. High-presision pressure sensor;Iseni,2002

3. Pressure Sensor;Cibinetto,2010

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design of a multi-physics coupling MEMS pressure sensor;Journal of Physics: Conference Series;2024-04-01

2. A Micro SOI Pressure Sensor With Compensation Hole for High Temperature Applications;IEEE Transactions on Components, Packaging and Manufacturing Technology;2024-03

3. Ultra-small high‐temperature pressure sensor chips fabricated in single‐layer (111) SOI wafers;Journal of Micromechanics and Microengineering;2023-06-21

4. High-Temperature Self-Compensating Absolute Micro-Pressure Sensor and Its Testing Method;IEEE Sensors Journal;2023-04-01

5. An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance;Micromachines;2022-12-17

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