Impact of shrinking measurement error budgets on qualification metrology sampling and cost
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SPIE
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1. Understanding and Improving Virtual Metrology Systems Using Bayesian Methods;IEEE Transactions on Semiconductor Manufacturing;2022-08
2. Scatterometry control for multiple electron beam lithography;SPIE Proceedings;2017-03-28
3. Hybrid scatterometry measurement for BEOL process control;SPIE Proceedings;2017-03-28
4. Advanced in-line metrology strategy for self-aligned quadruple patterning;SPIE Proceedings;2016-03-30
5. Through pitch monitoring by optical scatterometry;SPIE Proceedings;2015-03-19
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