Shape optimization of electrostatically driven microcantilevers using simulated annealing to enhance static travel range-Reference-Cited by-同舟云学术

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Shape optimization of electrostatically driven microcantilevers using simulated annealing to enhance static travel range

Published:2013-12-07 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Trivedi R. R.,Joglekar M. M.,Shimpi R. P.,Pawaskar D. N.

Publisher

SPIE

Reference16 articles.

1. Microactuators and their technologies

2. Electrostatic micromirrors for subaperturing in an adaptive optics system

3. On the static and dynamic response of electrostatic actuators;Elata,2005

4. Shape Optimization of Electrostatically Actuated Micro Cantilever Beam with Extended Travel Range using Simulated Annealing;Trivedi,2011

5. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Augmentation of the stable static travel range of electrostatically actuated slender nano-cantilevers by accounting for the influence of the van der Waals force;International Journal for Computational Methods in Engineering Science and Mechanics;2023-03-31

2. Static travel range augmentation of electrostatically actuated slender nano-cantilevers using particle swarm optimisation;Archive of Applied Mechanics;2023-02-16

3. The static pull-in instability analysis of electrostatically actuated shear deformable microbeams using single variable refined beam theory variants;Archive of Applied Mechanics;2022-08-04

4. Study on dynamic actuation in double microcantilever-based electrostatic microactuators with an in-house experimental set-up;Journal of Micro/Nanolithography, MEMS, and MOEMS;2018-03-05

5. Enhancement of static and dynamic travel range of electrostatically actuated microbeams using hybrid simulated annealing;International Journal of Mechanical Sciences;2015-07

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