Static travel range augmentation of electrostatically actuated slender nano-cantilevers using particle swarm optimisation-Reference-Cited by-同舟云学术

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Static travel range augmentation of electrostatically actuated slender nano-cantilevers using particle swarm optimisation

Published:2023-02-16 Issue:5 Volume:93 Page:2051-2080
ISSN:0939-1533
Container-title:Archive of Applied Mechanics
language:en
Short-container-title:Arch Appl Mech

Author:

Pakhare Kedar S.,Guruprasad P. J.,Shimpi Rameshchandra P.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering

Link

https://link.springer.com/content/pdf/10.1007/s00419-023-02372-w.pdf

Reference56 articles.

1. Abdel-Rahman, E.M., Younis, M.I., Nayfeh, A.H.: Characterization of the mechanical behavior of an electrically actuated microbeam. J. Micromech. Microeng. 12(6), 759–766 (2002). https://doi.org/10.1088/0960-1317/12/6/306

2. Aluru, N.R., White, J.: An efficient numerical technique for electrochemical simulation of complicated microelectromechanical structures. Sens. Actuators A 58(1), 1–11 (1997). https://doi.org/10.1016/S0924-4247(97)80218-X

3. Ansari, M.Z., Cho, C.: Deflection, frequency, and stress characteristics of rectangular, triangular, and step profile microcantilevers for biosensors. Sensors 9(8), 6046–6057 (2009). https://doi.org/10.3390/s90806046

4. Ballestra, A., Brusa, E., Gh Munteanu, M., Somà, A.: Experimental characterization of electrostatically actuated in-plane bending of microcantilevers. Microsyst. Technol. 14(7), 909–918 (2008). https://doi.org/10.1007/s00542-008-0597-0

5. Bathe, K.J.: Finite element procedures. Prentice Hall, New Jersey (1996)

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