Study on dynamic actuation in double microcantilever-based electrostatic microactuators with an in-house experimental set-up-Reference-Cited by-同舟云学术

Study on dynamic actuation in double microcantilever-based electrostatic microactuators with an in-house experimental set-up

Published:2018-03-05 Issue:01 Volume:17 Page:1
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Mukherjee Banibrata¹,Swamy Kenkere Balashanthamurthy Mruthyunjaya²,Sen Siddhartha³

Affiliation:

1. National Institute of Technology Rourkela, Department of Electronics and Communication Engineering,

2. Indian Institute of Science Bangalore, Centre for Nano Science and Engineering, Karnataka

3. Indian Institute of Technology Kharagpur, Department of Electrical Engineering, West Bengal

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Electrostatic pull-in instability in MEMS/NEMS: A review

2. A high-aspect-ratio two-axis electrostatic microactuator with extended travel range

3. Extending displacements of comb drive actuators by adding secondary comb electrodes

4. Extending the travel range of analog-tuned electrostatic actuators

5. Extending the traveling range with a cascade electrostatic comb-drive actuator

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