Extending displacements of comb drive actuators by adding secondary comb electrodes-Reference-Cited by-同舟云学术

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Extending displacements of comb drive actuators by adding secondary comb electrodes

Published:2006-02-27 Issue:4 Volume:16 Page:684-691
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Hou Max Ti-Kuang,Huang Gordon Kou-Wei,Huang Jing-Yi,Liao Ke-Min,Chen Rongshun,Yeh Jer-Liang Andrew

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Laterally Driven Polysilicon Resonant Microstructures

2. Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage

3. Fabrication of thick Si resonators with a frontside-release etch-diffusion process

4. Microscale materials testing using MEMS actuators

5. High-aspect-ratio Si vertical micromirror arrays for optical switching

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