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Microactuators and their technologies

Published:2000-06 Issue:4-5 Volume:10 Page:431-455
ISSN:0957-4158
Container-title:Mechatronics
language:en
Short-container-title:Mechatronics

Author:

Thielicke Ernst,Obermeier Ernst

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Reference68 articles.

1. Silicon as a mechanical material;Petersen;Proc. IEEE,1982

2. Resonant microsensors. Transducers ’87;Howe,1987

3. A piezoelectric micropump based on micromachining of silicon;van Lintel;Sensors and Actuators,1988

4. Microfluidics — a review;Gravesen,1993

5. Pin joints, gears, springs, cranks and other novel micromechanical structures;Fan,1987

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