Novel design of electrostatic micro cantilever for enhanced travel range

Abstract

Abstract Electrostatic micro actuators are commonly deployed micro electro mechanical system (MEMS) devices due to their unpretentious construction and well-matched micro fabrication processes. The phenomenan of pull-in instability puts substantial restrictions on the execution of electrostatically driven MEMS beam type actuators by restraining the range of travel. A larger working range is desirable for a wide variety of tuning applications. In this paper, mechanism of pull-in instability and means to extend the useful working range of the microactuator by changing the design is presented. It shows drastic improvement in the results. Important conclusions are drawn from the results.