Author:
Megtert Stephan,Pantenburg Franz J.,Achenbach Sven,Kupka Roland K.,Mohr Juergen,Roulliay Marc
Cited by
6 articles.
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1. Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation;Journal of Synchrotron Radiation;2018-04-24
2. Soft X-ray lithography of high aspect ratio SU8 submicron structures;Microsystem Technologies;2008-01-09
3. Deep X-ray lithography for the fabrication of microstructures at ELSA;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2001-07
4. Adhesion improvement in the deep X-ray lithography process using a central beam-stop;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-04
5. Microfabrication: LIGA-X and applications;Applied Surface Science;2000-09