Adhesion improvement in the deep X-ray lithography process using a central beam-stop
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
2. Influence of secondary effects on the structure quality in deep X-ray lithography
3. Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating base
4. Preliminary results on the use of mirrors for LIGA process
5. J.B. West, H.A. Padmore, in: G.V. Marr (Eds.), Handbook on Synchrotron Radiation, Vol. 2, Elsevier, Amsterdam, 1987, p. 21
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