Author:
Reznikova Elena,Mohr Juergen,Boerner Martin,Nazmov Vladimir,Jakobs Peter-Juergen
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. ANKA Instrumentation Book (2006) In: Baumbach T, Goettlicher J, Hagelstein M (eds) ANKA Angstroemquelle Karlsruhe, Institute for Synchrotron Radiation, Forschungszentrum Karlsruhe GmbH. http://ankaweb.fzk.de/_file/extras/extras_download_3.pdf
2. Ehrfeld W, Muenchmeyer D (1991) Three-dimensional microfabrication using synchrotron radiation. Nucl Instrum Methods Phys Res A 303:523–531
3. Feiertag G, Ehrfeld W, Lehr H, Schmidt A, Schmidt M (1997) Calculation and experimental determination of the structure transfer accuracy in deep X-ray lithography. J Micromech Microeng 7:23–331
4. Feldman M, Sun J (1992) Resolution limits in X-ray lithography. J Vac Sci Technol B10:3173–3176
5. Grün AE (1957) Lumineszenz-photometrische Messungen der Energieabsorption im Strahlungsfeld von Elektronenquellen. Eindimensionaler Fall in Luft. Z Naturforsch 12A:89–95
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