Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. S. Bradbury,Evolution of the Microscope, Pergamon Press, Oxford (1967).
2. R. Kingslake,Optical System Design, pp. 188–190, Academic Press, Orlando, FL (1983).
3. W. Taberelli and E. Loebach, U.S. Patent No. 4,346,164 (1982).
4. Optical projection lithography using lenses with numerical apertures greater than unity
5. Multiple-exposure interferometric lithography
Cited by
56 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献