Affiliation:
1. State Key Laboratory of Optoelectronic Materials and Technologies School of Materials Sun Yat‐sen University Shenzhen 518107 China
Abstract
AbstractAt present, most photodetectors work in atmospheric or vacuum environments, which leaves a large gap for detection under liquid conditions. However, this kind of research is of great significance, especially for the monitoring of 193 nm vacuum UV (VUV) light in the immersion lithography system underwater. Here, the p‐type diamond single crystal (PDSC) is applied as the photoelectrode for the construction of a VUV immersion photodetector with a PDSC‐ultra‐pure water‐Pt structure and a high response to 193 nm light. Under 193 nm excitation (@8 µW) and at 0 V, the PDSC immersion photodetector demonstrates a favorable characteristic of having a high responsivity of 5 mA·W−1. Due to its exceptional performance, this device has been proven to function as a highly‐sensitive and self‐powered VUV detector, with significant potential for utilization in the monitoring of 193 nm light in immersion lithography systems.
Funder
Natural Science Foundation of Guangdong Province for Distinguished Young Scholars
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials