Author:
Lee Saul,Byers Jeffrey,Jen Kane,Zimmerman Paul,Rice Bryan,Turro Nicholas J.,Willson C. Grant
Cited by
20 articles.
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1. Advanced Lithography;Springer Handbook of Semiconductor Devices;2022-11-11
2. Fast Polygons Proximity Detection for ICs Multiple Patterning Lithography;2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus);2021-01-26
3. Tilted ion implantation of spin-coated SiARC films for sub-lithographic and two-dimensional patterning;Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019;2019-03-26
4. Higher-Order Lithography: Double-Deprotected Chemically Amplified Photoresists (DD-CAMP);Journal of Photopolymer Science and Technology;2017
5. Alternative resist approaches;Materials and Processes for Next Generation Lithography;2016