Author:
Robinson Alex P.G.,Lawson Richard A.
Reference80 articles.
1. Photoresist materials: a historical perspective;Willson;Proc SPIE,1997
2. Cramming more components onto integrated circuits;Moore;Electronics,1965
3. Ultrafast deep UV lithography with excimer lasers;Jain;Electron Device Lett IEEE,1982
4. High-resolution positive resists for electron-beam exposure;Haller;IBM J Res Dev,1968
5. Deep UV lithography;Lin;J Vac Sci Technol,1975
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献