Multilayer CMP hotspot modeling through deep learning-Reference-Cited by-同舟云学术

Multilayer CMP hotspot modeling through deep learning

Published:2019-03-20 Issue: Volume: Page:
ISSN:
Container-title:Design-Process-Technology Co-optimization for Manufacturability XIII
language:
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Author:

Francisco Luis,Mao Rui,Katakamsetty Ushasree,Verma Piyush,Pack Robert C.

Publisher

SPIE

Reference14 articles.

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3. New cmp processes development and challenges for 7nm and beyond;Huang,2018

4. 20nm cmp model calibration with optimized metrology data and cmp model applications;Katakamsetty,2015

5. Cutting-edge cmp modeling for front-end-of-line (feol) and full stack hotspot detection for advanced technologies;Katakamsetty,2017

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