Author:
Polignano Maria L.,Bresolin C.,Cazzaniga F.,Sabbadini Anna,Queirolo G.
Cited by
19 articles.
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1. Comparison of techniques for detecting metal contamination in silicon wafers;Spectrochimica Acta Part B: Atomic Spectroscopy;2018-11
2. Source of Metals in Si and Ge Crystal Growth and Processing;Metal Impurities in Silicon- and Germanium-Based Technologies;2018
3. Detection and reduction of tungsten contamination in ion implantation processes;physica status solidi (c);2016-07-11
4. Tungsten contamination in ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2016-06
5. Review—Characterization of Metal-Contamination Effects in Silicon;ECS Journal of Solid State Science and Technology;2015-12-10