CNT pellicles: Imaging results of the first full-field EUV exposures-Reference-Cited by-同舟云学术

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CNT pellicles: Imaging results of the first full-field EUV exposures

Published:2021-02-23 Issue: Volume: Page:
ISSN:
Container-title:Extreme Ultraviolet (EUV) Lithography XII
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Author:

Bekaert Joost,Gallagher Emily,Jonckheere Rik,Van Look Lieve,Aubert Remko,Nair Vineet V.,Timmermans Marina Y.,Pollentier Ivan,Hendrickx Eric,Klein Alexander,Yegen Gökay,Broman Pär

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparative Study of the Thermal Stability of Be-Based Extreme Ultraviolet Pellicles;Technical Physics;2023-12

2. Protective Free-Standing Films for Projection Lithography Installations in the Extreme UV Range;Russian Microelectronics;2023-10

3. Protective Freely Hanging Films for Projection Lithography Installations in the Extreme UV Range;Микроэлектроника;2023-09-01

4. CNT-based pellicles for the next generation of EUV scanners;Japanese Journal of Applied Physics;2023-03-10

5. Fabrication of a 100 × 100 mm² nanometer-thick graphite pellicle for extreme ultraviolet lithography by a peel-off and camphor-supported transfer approach;Nanoscale Advances;2022

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