Protective Free-Standing Films for Projection Lithography Installations in the Extreme UV Range
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Published:2023-10
Issue:5
Volume:52
Page:344-355
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ISSN:1063-7397
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Container-title:Russian Microelectronics
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language:en
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Short-container-title:Russ Microelectron
Author:
Zuev S. Yu.,Lopatin A. Ya.,Luchin V. I.,Salashchenko N. N.,Tsybin N. N.,Chkhalo N. I.
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference55 articles.
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