Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference22 articles.
1. K. Guckel, K. J. Skrobis, T. R. Christenson, J. Klein, S. Han, B. Choi, and E. G. Lovell , “Fabrication of assembled micromechanical components via deep X-ray lithography,” inProc. MEMS’91, Nara, Japan, Jan., pp. 74–79 (1991).
2. High-aspect-ratio micromachining via deep X-ray lithography
3. Low-cost HARMS process
4. UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole
5. High aspect ratio patterning with a proximity ultraviolet source
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