High-aspect-ratio micromachining via deep X-ray lithography-Reference-Cited by-同舟云学术

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High-aspect-ratio micromachining via deep X-ray lithography

Published:1998 Issue:8 Volume:86 Page:1586-1593
ISSN:0018-9219
Container-title:Proceedings of the IEEE
language:
Short-container-title:Proc. IEEE

Author:

Guckel H.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx4/5/15216/00704264.pdf?arnumber=704264

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