Comparison Of Different X-Ray Sources: X-Ray Tubes, Laser Induced Plasma Sources, Compact And Conventional Storage Rings
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. X-ray lithography in IBM, 1980–1992, the development years;IBM Journal of Research and Development;1993-05
2. Development Of A Compact Synchrotron Radiation System For X-Ray Lithography;Optical Engineering;1988-07-01
3. Compact electron storage rings;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1988-04
4. A MOSFET, manufactured with synchrotron X-ray lithography;Microelectronic Engineering;1986-12