X-ray lithography in IBM, 1980–1992, the development years
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Published:1993-05
Issue:3
Volume:37
Page:299-318
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ISSN:0018-8646
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Container-title:IBM Journal of Research and Development
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language:
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Short-container-title:IBM J. Res. & Dev.
Subject
General Computer Science
Cited by
14 articles.
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