Development Of A Compact Synchrotron Radiation System For X-Ray Lithography
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A New Method for Measuring the Neutralization Factor in a Compact Electron Storage Ring;Japanese Journal of Applied Physics;1992-08-15
2. Ion effects in a compact electron storage ring;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1990-09
3. Influence of Synchrobetatron Resonance on Low-Energy Injection Beam with a Compact Storage Ring;Japanese Journal of Applied Physics;1990-08-20
4. X-ray lithography, where it is now, and where it is going;Journal of Electronic Materials;1990-07
5. Experimental evaluation of an electron-beam wobbling method with a compact storage ring;Journal of Physics D: Applied Physics;1990-06-14
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