Process highlights to enhance directed self-assembly contact patterning performances-Reference-Cited by-同舟云学术

Process highlights to enhance directed self-assembly contact patterning performances

Published:2016-10-18 Issue:4 Volume:15 Page:043503
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Gharbi Ahmed¹,Tiron Raluca¹,Argoud Maxime¹,Chamiot-Maitral Gaëlle¹,Fouquet Antoine¹,Lapeyre Céline¹,Barros Patricia Pimenta¹,Delachat Florian¹,Bos Sandra¹,Bouanani Shayma²,Chevalier Xavier³,Nicolet Célia³,Navarro Christophe³,Cayrefourcq Ian³,Pain Laurent¹

Affiliation:

1. CEA-LETI, MINATEC, 17 Rue des Martyrs, 38054 Grenoble, Cedex 9, France

2. STMicroelectronics, 850 Rue Jean Monnet, 38920 Crolles, France

3. ARKEMA FRANCE, Route Nationale 117, BP34-64170 Lacq, France

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Block Copolymer Based Nanostructures: Materials, Processes, and Applications to Electronics

2. Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

3. The potential of block copolymer’s directed self-assembly for contact hole shrink and contact multiplication

4. SRAM, NAND, DRAM contact hole patterning using block copolymer directed self-assembly guided by small topographical templates

5. Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab

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3. X-ray characterization of contact holes for block copolymer lithography;Journal of Applied Crystallography;2019-02-01

4. Pillars fabrication by DSA lithography: material and process options;Advances in Patterning Materials and Processes XXXV;2018-03-19

5. An embedded neutral layer for advanced surface affinity control in grapho-epitaxy directed self-assembly;Nanoscale;2018