Real-time closed-loop control for micro mirrors with quasistatic comb drives-Reference-Cited by-同舟云学术

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Real-time closed-loop control for micro mirrors with quasistatic comb drives

Published:2016-03-15 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Schroedter Richard,Sandner Thilo,Janschek Klaus,Roth Matthias,Hruschka Clemens

Publisher

SPIE

Reference24 articles.

1. Jerk and Current Limited Flatness-based Open Loop Control of Foveation Scanning Electrostatic Micromirrors;Schroedter,2014

2. Modellgestiitzte Bewegungsfuhrung von qua- sistatischen Mikroscannern (Model-based motion tracking for quasistatic microscanners);Schroedter,2013

3. Flatness-based open loop command tracking for quasistatic microscanners;Janschek,2013

4. Ultracompact laser projection systems based on two-dimensional resonant microscanning mirrors

5. Applications and requirements for MEMS scanner mirrors;Wolter,2005

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1. Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance;IEEE Access;2023

2. Data based modelling and identification of nonlinear SDOF MOEMS mirror;MOEMS and Miniaturized Systems XVIII;2019-03-04

3. A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°;MOEMS and Miniaturized Systems XVIII;2019-03-04

4. Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design;Mechatronics;2018-12

5. Repetitive nonlinear control for linear scanning micro mirrors;MOEMS and Miniaturized Systems XVII;2018-02-22

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