Data based modelling and identification of nonlinear SDOF MOEMS mirror
Author:
Publisher
SPIE
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1. Accurately estimating the scanning angle of an electrostatic MEMS mirror with a novel damping model;Sensors and Actuators A: Physical;2024-08
2. Precise Synchronization Control of Parametrically Driven Resonant MEMS Mirrors for Lissajous Scanning with a Fixed Frequency Ratio;2024 IEEE International Conference on Advanced Intelligent Mechatronics (AIM);2024-07-15
3. Implementation of an all-digital electrostatic micro-mirror controller;2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP);2023-05-28
4. Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars;IEEE Transactions on Industrial Electronics;2022-03
5. Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors;Journal of Microelectromechanical Systems;2021-12
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