A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°-Reference-Cited by-同舟云学术

A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°

Published:2019-03-04 Issue: Volume: Page:
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Container-title:MOEMS and Miniaturized Systems XVIII
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Author:

Gu-Stoppel Shanshan,Lisec Thomas,Fichtner Simon,Funck Nico,Eisermann Christian,Lofink Fabian,Wagner Bernhard,Müller-Groeling Axel

Publisher

SPIE

Reference6 articles.

1. Real-time closed-loop control for micro mirrors with quasistatic comb drives

2. A thermal bimorph micromirror with large bi-directional and vertical actuation

3. Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors;Gu-Stoppel,2014

4. S. Gu-Stoppel et al., “Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners,” in 2013 Transducers Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013, pp. 2489–2492.

5. Entwicklung und Integration von in-situ Sputterprozessen für PZT zum Einsatz in MEMS Aktuatoren;Kaden;Christian-Albrechts-Universität zu Kiel, Kiel,2015

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