Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners-Reference-Cited by-同舟云学术

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Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

Published:2013-06 Issue: Volume: Page:
ISSN:
Container-title:2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
language:
Short-container-title:

Author:

Gu-Stoppel S.¹,Janes J.¹,Quenzer H. J.¹,Hofmann U.¹,Kaden D.¹,Wagner B.¹,Benecke W.¹

Affiliation:

1. Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/6599514/6626676/06627311.pdf?arnumber=6627311

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3. A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights;MOEMS and Miniaturized Systems XIX;2020-02-28

4. A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°;MOEMS and Miniaturized Systems XVIII;2019-03-04

5. Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors;SPIE Proceedings;2016-03-15

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