Water-Immersible MEMS Mirror with a Large Optical Aperture-Reference-Cited by-同舟云学术

Water-Immersible MEMS Mirror with a Large Optical Aperture

Published:2024-02-02 Issue:2 Volume:15 Page:235
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Yang Yi¹²,Liu Yichen³^ORCID,Su Yongquan¹³,Wang Yang³⁴^ORCID,Zhang Yonggui³,Chen Hao³,Wang Lihao³,Wu Zhenyu¹²³⁴^ORCID

Affiliation:

1. School of Microelectronics, Shanghai University, Shanghai 200444, China

2. Shanghai Industrial Technology Research Institute, Shanghai 201800, China

3. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

4. University of Chinese Academy of Sciences, Beijing 100049, China

Abstract

This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter. The resonant frequencies of the device are 1011 Hz in air and 342 Hz in water. The scanning angle reaches ±5° and ±2° at resonant frequencies in air and water, respectively. The cavitation phenomenon is observed when the device is operating in water, which leads the device to electrical failure. To address this issue, a device with reduced resonant frequencies—246 Hz and 152 Hz in air and water—is characterized, through which the bubbles can be effectively prohibited. This MEMS mirror could potentially be used in ultrasound and photoacoustic microscopy applications.

Funder

National Key R&D Program of China

Shanghai Municipal Science and Technology Commission

“Science and Technology Innovation Action Plan” Daystar Project

Publisher

MDPI AG

Link

https://www.mdpi.com/2072-666X/15/2/235/pdf

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